高性能P型2次元半導体MoSi₂N₄単結晶のウェハー規模成長に成功(Scientists Achieve Wafer-Scale Growth of High-Performance P-Type 2D Semiconductor MoSi₂N₄ Single Crystals)

2026-08-28 中国科学院(CAS)

中国科学院金属研究所の研究チームは、p型二次元(2D)半導体である単層MoSi₂N₄のウエハースケール・エピタキシャル単結晶成長に成功した。Cu(111)単結晶基板上で化学気相成長法を用い、基板表面の<110>ステップを利用してMoSi₂N₄を同一方向に核生成させ、結晶粒界のない連続単結晶膜を形成した。得られた材料は高い結晶品質を示し、固有キャリア移動度は154 cm² V⁻¹ s⁻¹に達した。これを用いたトランジスタアレイでは、約3.8±1.4×10⁶のオン・オフ比、最大17.96 μA μm⁻¹のオン電流密度を実現し、WSe₂デバイスより高い安定性も示した。さらに同手法はWSi₂N₄にも適用可能で、2D材料によるCMOS集積回路や次世代電子・情報デバイスに向けたウエハースケール単結晶成長の一般的手法として期待される。

高性能P型2次元半導体MoSi₂N₄単結晶のウェハー規模成長に成功(Scientists Achieve Wafer-Scale Growth of High-Performance P-Type 2D Semiconductor MoSi₂N₄ Single Crystals)
Single-orientation nucleation mechanism of monolayer MoSi2N4 induced by surface steps on Cu(111) single crystals. (Image by IMR)

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高安定性p型半導体単層MoSi₂N₄単結晶のウェハスケール成長 Wafer-scale growth of highly stable p-type semiconducting monolayer MoSi2N4 single crystals

Su Sun,Chuan Xu,Keqiang Ji,Yuexing Xia,Bo Tong,Jinmeng Tong,Chen Chen,Wenqin Zhao,Duanliang Zhou,Qinghe Wang,Lixin Yang,Qiang Wang,Miaomiao Li,Biyuan Zheng,Lai-Peng Ma,Xinfeng Liu,Zhibo Liu,Mengjian Zhu,Kaihui Liu,Peng Liu,Kaili Jiang,Hui-Ming Cheng & Wencai Ren
Nature Materials  Published:08 July 2026
DOI:https://doi.org/10.1038/s41563-026-02669-5

Abstract

Single-crystal wafers of p-type two-dimensional (2D) semiconductors are highly desired for next-generation electronics. However, p-type 2D semiconductors remain scarce, and achieving wafer-scale monolayer single crystals of such materials is even more challenging. Here we report the wafer-scale growth of p-type semiconducting monolayer MoSi2N4 single crystals on Cu (111) foils with prestored Mo and Si atoms. The <110> steps on Cu (111) guide the nucleation and unidirectional orientation of monolayer MoSi2N4 domains, enabling their seamless stitching into a continuous single-crystal film. The resulting MoSi2N4 exhibits exceptional quality, with an intrinsic mobility of 154 cm2 V−1 s−1. Field-effect transistor arrays fabricated from this material deliver excellent electrical performance, including an on/off ratio of ~3.8 ± 1.4 × 106 and an on-state current density up to ~17.96 μA μm−1 (1 μm channel length), along with superior stability compared with monolayer WSe2-based counterparts. Furthermore, this versatile growth strategy also enables the fabrication of wafer-scale monolayer WSi2N4 single crystals. This work establishes a promising p-type 2D semiconductor platform for future integrated circuits.

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