2026-01-05 フラウンホーファー研究機構

© Fraunhofer IPMS
Micro-gas chromatography columns (µGC columns) etched into a 200-mm silicon wafer. The columns are sealed with a second wafer using a wafer-bonding process and then separated. They are subsequently coated with a stationary phase, similar to conventional GC columns.
<関連情報>


