真空紫外レーザー出力を大幅に向上させる新結晶を開発（Scientists Develop New Crystal, Achieving Breakthrough in Vacuum Ultraviolet Laser Output）

2026-01-30 中国科学院（CAS）

＜関連情報＞

• https://english.cas.cn/newsroom/cas-in-media/202601/t20260130_1147757.shtml
• https://www.nature.com/articles/s41586-025-10007-z#citeas

NH4 B4O 6 F結晶における真空紫外線第二高調波発生 Vacuum ultraviolet second-harmonic generation in NH4B4O6F crystal

Fangfang Zhang,Zilong Chen,Chen Cui,Zhihua Yang,Miriding Mutailipu,Fuming Li,Xueling Hou,Xifa Long & Shilie Pan
Nature  Published:28 January 2026
DOI:https://doi.org/10.1038/s41586-025-10007-z

Abstract

Vacuum ultraviolet (VUV, 100–200 nm) light sources are crucial for advanced spectroscopy, quantum research and semiconductor lithography^1,2,3. Compared with conventional large-scale VUV generation technologies^4,5,6,7, second-harmonic generation (SHG) through nonlinear optical (NLO) crystals^8,9,10 is the simplest and most efficient method. However, the scarcity of suitable NLO crystals has constrained the production of VUV light through SHG: existing materials fail to meet phase-matching requirements, suffer from low conversion efficiency or have severe growth limitations^{11,12,13,14,15,16,17,18,19}. In this study, we report the development of the fluorooxoborate crystal NH₄B₄O₆F (abbreviated as ABF) as a promising material for VUV light generation. VUV devices with specific phase-matching angles were constructed, achieving a record 158.9-nm light through phase-matching SHG and a maximum nanosecond pulse energy of 4.8 mJ at 177.3 nm with a conversion efficiency of 5.9%. The enhanced NLO performance is attributed to optimized arrangements of fluorine-based units creating asymmetric sublattices. This work provides further material in the NLO field, with potential for applications in compact, high-power VUV lasers using ABF.