2025-03-24 産業技術総合研究所
データ駆動型レーザー加工によるナノ周期構造形成の実証
＜関連情報＞
- https://www.aist.go.jp/aist_j/press_release/pr2025/pr20250324/pr20250324.html
- https://www.light-am.com/article/doi/10.37188/lam.2025.003
リアルタイムモニタリングとアクティブフィードバック制御を用いたフェムト秒レーザー誘起周期性ナノ構造のガラス上への安定した作製 Stable fabrication of femtosecond-laser-induced periodic nanostructures on glass using real-time monitoring and active feedback control
Godai Miyaji , Daisuke Nagai, Takemichi Miyoshi, Hideyuki Takada, Dai Yoshitomi, Aiko Narazaki
Light: Advanced Manufacturing Published:18 March 2025
DOI:https://doi.org/10.37188/lam.2025.003
Abstract
Femtosecond laser pulses can be employed to directly form periodic nanostructures on solid surfaces, including hard materials such as diamond and sapphire, via ablation. Thus, this technique is promising for industrial nanofabrication applications. However, the stable formation of uniform nanostructures is challenging because of their high sensitivity to changes in processing conditions, such as the surface roughness of materials and laser power. Herein, we report a real-time monitoring and control approach for fabricating high-quality nanostructures on glass surfaces. We measured the reflectance and transmittance of a laser-irradiated surface simultaneously and determined their specific values corresponding to the formation of a uniform nanostructure with a period of 200 nm and depth of 1 μm. By utilising these values as feedback signals in a proportional-integral-derivative control system, we adjusted the laser power during irradiation to form a uniform nanostructure. This approach led to a significant reduction in the defect ratio of the nanostructure (~2.4%), which represents a 10-fold reduction compared with uncontrolled processing. Our results demonstrate the potential for the stable and direct fabrication of high-quality nanostructures on solids and offer a valuable method for the quality assurance of nanostructures for various applications.
Research Summary
Data-driven laser nanofabrication: real-time optical monitoring enables stable nanostructuring
Structures below the wavelength of light are expected to have various kinds of applications in optical devices because of their ability to control optical properties. Removal or bonding structure changes by ultrashort laser pulses can easily fabricate nanostructures on or inside solid surfaces. A collaborated group led by Dr. Godai Miyaji from TUAT, Japan and Dr. Aiko Narazaki from AIST, Japan has developed a technique for real-time optical monitoring of nanostructure formation by ultra-short laser pulses and demonstrated that high-quality nanostructures can be stably fabricated by actively controlling a laser parameter.
