2023-06-01 ペンシルベニア州立大学(PennState)
◆研究者は、自身の娘の体重測定の経験から着想を得ており、微細な構造とイオン層を組み合わせたセンサーが最も有望であることを見い出しました。さらに、センサーの線形性や感度の向上にも取り組み、応用範囲の拡大を図っています。
<関連情報>
- https://www.psu.edu/news/materials-research-institute/story/newborn-baby-inspires-sensor-design-simulates-human-touch/
- https://www.nature.com/articles/s41467-023-38274-2
レーザー誘起勾配マイクロピラミッドにより、超広帯域の線形領域で高感度を実現したイオントロン圧力センサーを開発 Iontronic pressure sensor with high sensitivity over ultra-broad linear range enabled by laser-induced gradient micro-pyramids
Ruoxi Yang,Ankan Dutta,Bowen Li,Naveen Tiwari,Wanqing Zhang,Zhenyuan Niu,Yuyan Gao,Daniel Erdely,Xin Xin,Tiejun Li & Huanyu Cheng
Nature Communications Published:01 June 2023
DOI:https://doi.org/10.1038/s41467-023-38274-2
Abstract
Despite the extensive developments of flexible capacitive pressure sensors, it is still elusive to simultaneously achieve excellent linearity over a broad pressure range, high sensitivity, and ultrahigh pressure resolution under large pressure preloads. Here, we present a programmable fabrication method for microstructures to integrate an ultrathin ionic layer. The resulting optimized sensor exhibits a sensitivity of 33.7 kPa-1 over a linear range of 1700 kPa, a detection limit of 0.36 Pa, and a pressure resolution of 0.00725% under the pressure of 2000 kPa. Taken together with rapid response/recovery and excellent repeatability, the sensor is applied to subtle pulse detection, interactive robotic hand, and ultrahigh-resolution smart weight scale/chair. The proposed fabrication approaches and design toolkit from this work can also be leveraged to easily tune the pressure sensor performance for varying target applications and open up opportunities to create other iontronic sensors.
