極薄の形状可変ミラーを実現! X線ビームの大きさが3400倍変化

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2025-06-30 名古屋大学

極薄の形状可変ミラーを実現! X線ビームの大きさが3400倍変化

名古屋大学と理研の研究グループは、厚さ0.5mmの圧電単結晶ニオブ酸リチウム(LN)ウエハ1枚で構成された極薄の形状可変ミラーを開発。LNの分極反転特性を活用し、接合なしでバイモルフ構造を形成、従来比で大幅に変形可能となった。これにより、X線ビームサイズを世界初で3400倍以上変化させることに成功。視野や分解能を自在に調整できる多機能型X線分析が可能となり、今後は可視光領域での応用も期待される。

<関連情報>

偏光反転ニオブ酸リチウムウエハーを用いた超薄型モノリシックバイモルフミラー Ultrathin monolithic bimorph mirror using polarization-inverted lithium niobate wafer

Takato Inoue,Junya Yoshimizu,Toma Ueyama,Maaya Kano,Yoshiki Kohmura,Makina Yabashi & Satoshi Matsuyama
Scientific Reports  Published:27 June 2025
DOI:https://doi.org/10.1038/s41598-025-05019-8

Abstract

Deformable mirrors (DMs) serve diverse applications and have been adopted in X-ray optics recently. DMs are being used in various X-ray optical systems with variable parameters, with piezoelectric bimorph mirrors favored the most. However, conventional bimorph mirrors have limited deformation capabilities. In this study, we propose a novel monolithic bimorph mirror that utilizes the polarization inversion properties of lithium niobate. Unlike traditional bimorph mirror designs that require bonding multiple materials, this approach allows for an extremely thin mirror that significantly enhances its deformation capabilities. Experimental fabrication of the mirror demonstrated a substantial curvature change of 0.1 m− 1. Furthermore, upon introduction of this novel mirror into SPring-8 as X-ray focusing optics, it achieved deformation to a target elliptical shape with a 1 μm peak-to-valley height and 3 nm precision. This accuracy and large deformation amount allowed for huge variation in the X-ray beam size from 200 nm to 683 μm. Such extensive beam size variability is offering significant potential for advancing X-ray analytical and imaging applications.

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